Integration of BST varactors with surface acoustic wave device by film transfer technology for tunable RF filters
Hirano, Hideki, Kimura, Tetsuya, Koutsaroff, Ivoyl P, Kadota, Michio, Hashimoto, Ken-ya, Esashi, Masayoshi, Tanaka, ShujiVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025005
Date:
February, 2013
File:
PDF, 1.29 MB
english, 2013