Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials
Lee, Sang Woon, Choi, Byung Joon, Eom, Taeyong, Han, Jeong Hwan, Kim, Seong Keun, Song, Seul Ji, Lee, Woongkyu, Hwang, Cheol SeongVolume:
257
Language:
english
Journal:
Coordination Chemistry Reviews
DOI:
10.1016/j.ccr.2013.04.010
Date:
December, 2013
File:
PDF, 1.11 MB
english, 2013