Ellipsometrical characterization of complex refractive...

Vacuum 2013 / 8 Vol. 94

Ellipsometrical characterization of complex refractive index depth profile of 50 keV silicon ion implanted PMMA

Russev, Stoyan C., Tsutsumanova, Gichka G., Stefanov, Ivan L., Hadjichristov, Georgi B.
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Volume:
94
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.01.014
Date:
August, 2013
File:
PDF, 828 KB
english, 2013
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