Analysis of Magnetic Field and Discharge Plasma for HTS...

IEEE Transactions on Appiled Superconductivity 2010 / 06 Vol. 20; Iss. 3

Analysis of Magnetic Field and Discharge Plasma for HTS Magnetron Sputtering Apparatus

Qingquan Qiu,, Liye Xiao,, Tianbin Huang,, Guomin Zhang,, Xiaohang Li,
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/TASC.2010.2044567
Date:
June, 2010
File:
PDF, 694 KB
english, 2010
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