A valve-less planar pump isotropically etched in silicon

Journal of Micromechanics and Microengineering 1996 / 03 Vol. 6; Iss. 1

A valve-less planar pump isotropically etched in silicon

Olsson, Anders, Enoksson, Peter, Stemme, Göran, Stemme, Erik
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Volume:
6
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/6/1/020
Date:
March, 1996
File:
PDF, 170 KB
english, 1996
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