Fabrication of the similar porous alumina silicon template...

Applied Surface Science 2013 / 7 Vol. 276

Fabrication of the similar porous alumina silicon template for soft UV nanoimprint lithography

Sun, Tangyou, Xu, Zhimou, Zhao, Wenning, Wu, Xinghui, Liu, Sisi, Zhang, Zheng, Wang, Shuangbao, Liu, Wen, Liu, Shiyuan, Peng, Jing
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Volume:
276
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.03.098
Date:
July, 2013
File:
PDF, 3.12 MB
english, 2013
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