Closed-loop micromachined accelerometer based on thermal convection
Garraud, A., Loisel, P., Giani, A., Combette, P., Deblonde, A.Volume:
7
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2012.0702
Date:
November, 2012
File:
PDF, 181 KB
english, 2012