The Development of Polymer-Based Planar Microcryogenic...

Journal of Microelectromechanical Systems 2013 / 02 Vol. 22; Iss. 1

The Development of Polymer-Based Planar Microcryogenic Coolers

Wang, Yunda, Lewis, Ryan, Lin, Martin M.-H., Radebaugh, Ray, Lee, Y. C.
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2227461
Date:
February, 2013
File:
PDF, 1.28 MB
english, 2013
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