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The Development of Polymer-Based Planar Microcryogenic Coolers
Wang, Yunda, Lewis, Ryan, Lin, Martin M.-H., Radebaugh, Ray, Lee, Y. C.Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2227461
Date:
February, 2013
File:
PDF, 1.28 MB
english, 2013