Experimental evaluation of MEMS strain sensors embedded in...

Journal of Microelectromechanical Systems 1999 / Sept. Vol. 8; Iss. 3

Experimental evaluation of MEMS strain sensors embedded in composites

Hautamaki, C., Zurn, S., Mantell, S.C., Polla, D.L.
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Volume:
8
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.788631
Date:
January, 1999
File:
PDF, 542 KB
english, 1999
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