Fabrication of 3D fractal structures using nanoscale...

Journal of Micromechanics and Microengineering 2013 / 05 Vol. 23; Iss. 5

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

Berenschot, Erwin J W, Jansen, Henri V, Tas, Niels R
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/5/055024
Date:
May, 2013
File:
PDF, 2.00 MB
english, 2013
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