A linear piezoelectric stepper motor with submicrometer...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 1990 / 09 Vol. 37; Iss. 5

A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range

Judy, J.W., Polla, D.L., Robbins, W.P.
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Volume:
37
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/58.105249
Date:
September, 1990
File:
PDF, 711 KB
english, 1990
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