Measurement of Anisotropic Biaxial Stresses in Si...

Measurement of Anisotropic Biaxial Stresses in Si 1- x Ge x /Si Mesa Structures by Oil-Immersion Raman Spectroscopy

Kosemura, Daisuke, Tomita, Motohiro, Usuda, Koji, Tezuka, Tsutomu, Ogura, Atsushi
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.04CA05
Date:
April, 2013
File:
PDF, 721 KB
english, 2013
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