Etching Properties of HfO 2...

Etching Properties of HfO 2 Thin Films in Cl 2 /BCl 3 /Ar Plasma

Kim, Dong-Pyo, Kim, Gwan-Ha, Woo, Jong-Chang, Yang, Xue, Um, Doo-Seung, Kim, Chang-Il
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Volume:
381
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190902880621
Date:
June, 2009
File:
PDF, 2.48 MB
english, 2009
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