Influence of pulsed bias on TiO2 thin films prepared on...

Surface and Coatings Technology 2013 / 08 Vol. 229

Influence of pulsed bias on TiO2 thin films prepared on silicon by arc ion plating: Experimental and simulation study

Zhang, Min, Liu, Lei, Yang, Xiaoxu, Xu, Feifei, Liu, Chengsen, Gong, Faquan, Li, Mengke
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Volume:
229
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.05.083
Date:
August, 2013
File:
PDF, 1.27 MB
english, 2013
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