KrF excimer laser micromachining of MEMS materials:...

KrF excimer laser micromachining of MEMS materials: characterization and applications

Liu, Kewei, NiCkolov, Zhorro, Oh, Jonghyun, “Moses” Noh, Hongseok
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/1/015012
Date:
January, 2012
File:
PDF, 1.66 MB
english, 2012
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