KrF excimer laser micromachining of MEMS materials: characterization and applications
Liu, Kewei, NiCkolov, Zhorro, Oh, Jonghyun, “Moses” Noh, HongseokVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/1/015012
Date:
January, 2012
File:
PDF, 1.66 MB
english, 2012