Design, fabrication, and measurement of high-sensitivity...

Journal of Microelectromechanical Systems 2003 / 08 Vol. 12; Iss. 4

Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

Li-Peng Wang,, Wolf, R.A., Yu Wang,, Deng, K.K., Lichun Zou,, Davis, R.J., Trolier-McKinstry, S.
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2003.811749
Date:
August, 2003
File:
PDF, 1.07 MB
english, 2003
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