SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - Reactive etching of a novel phase change material Si 2 Sb 2 Te 3
Xia, Mengjiao, Rao, Feng, Song, Zhitang, Ren, Kun, Wu, Liangcai, Liu, Bo, Gan, Fuxi, Song, ZhitangVolume:
8782
Year:
2013
Language:
english
DOI:
10.1117/12.2016674
File:
PDF, 1.76 MB
english, 2013