![](/img/cover-not-exists.png)
[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators
Jaakkola, Antti, Prunnila, Mika, Pensala, TuomasYear:
2012
Language:
english
DOI:
10.1109/FCS.2012.6243712
File:
PDF, 2.25 MB
english, 2012