Ferroelectric-based electrostatic micromotors with...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2006 / 12 Vol. 53; Iss. 12

Ferroelectric-based electrostatic micromotors with nanometer gaps

Kostsov, Edward
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Volume:
53
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2006.176
Date:
December, 2006
File:
PDF, 458 KB
english, 2006
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