A novel method of using the OES line ratio to determine the...

A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas

Li, Jiang, Zhu, Xi-Ming, Pu, Yi-Kang
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Volume:
44
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/44/45/455203
Date:
November, 2011
File:
PDF, 444 KB
english, 2011
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