Modeling of the formation and transport of nanoparticles in silane plasmas
De Bleecker, Kathleen, Bogaerts, Annemie, Goedheer, WimVolume:
70
Language:
english
Journal:
Physical Review E
DOI:
10.1103/PhysRevE.70.056407
Date:
November, 2004
File:
PDF, 96 KB
english, 2004