Two-Dimensional Fluid Simulation of Collisional Plasma Sheath over rf Powered Electrode with Cylindrical Hole
Lujing, Hou, Younian, Wang, Miskvic, Z LVolume:
6
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/6/4/012
Date:
August, 2004
File:
PDF, 626 KB
english, 2004