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Impact of incorporated Al on the TiN/HfO[sub 2] interface effective work function
Xiong, Ka, Robertson, John, Pourtois, Geoffrey, PeÌtry, Jasmine, MuÌller, MarkusVolume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2986158
File:
PDF, 1.48 MB
english, 2008