Nitrogen effect on the dust presence and behavior in a radio frequency CH[sub 4]âN[sub 2] discharge
PeÌreira, JeÌreÌmy, Massereau-Guilbaud, VeÌronique, GeÌraud-Grenier, Isabelle, Plain, AndreÌVolume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2829782
File:
PDF, 969 KB
english, 2008