Particle-in-cell simulation of an electronegative plasma...

Particle-in-cell simulation of an electronegative plasma under direct current bias studied in a large range of electronegativity

Oudini, N., Raimbault, J.-L., Chabert, P., Meige, A., Aanesland, A.
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Volume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4798501
File:
PDF, 626 KB
english, 2013
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