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Fluxes of Charged Particles in Two-Chamber ICP Discharge in Oxygen
Bogdanov, Evgeny A., Chirtsov, Alexander S., Kudryavtsev, Anatoly A.Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2011.2155679
Date:
November, 2011
File:
PDF, 360 KB
english, 2011