Electron energy distributions and anomalous skin depth...

Physical Review E 2002 / 12 Vol. 66; Iss. 6

Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges

Vasenkov, Alex V., Kushner, Mark J.
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Volume:
66
Language:
english
Journal:
Physical Review E
DOI:
10.1103/PhysRevE.66.066411
Date:
December, 2002
File:
PDF, 380 KB
english, 2002
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