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Secondary electron induced asymmetry in capacitively coupled plasmas
Lafleur, T, Chabert, P, Booth, J PVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/13/135201
Date:
April, 2013
File:
PDF, 663 KB
english, 2013