Degree of dissociation measured by FTIR absorption...

Plasma Sources Science and Technology 1998 / 05 Vol. 7; Iss. 2

Degree of dissociation measured by FTIR absorption spectroscopy applied to VHF silane plasmas

Sansonnens, L, Howling, A A, Hollenstein, Ch
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Volume:
7
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/7/2/004
Date:
May, 1998
File:
PDF, 147 KB
english, 1998
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