A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope...

Journal of Microelectromechanical Systems 2010 / 06 Vol. 19; Iss. 3

A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure

Zhong Yang Guo,, Long Tao Lin,, Qian Cheng Zhao,, Zhen Chuan Yang,, Huikai Xie,, Gui Zhen Yan,
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2046477
Date:
June, 2010
File:
PDF, 1.95 MB
english, 2010
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