Titanium nitride oxidation chemistry: An x-ray...

Journal of Applied Physics 1992 Vol. 72; Iss. 7

Titanium nitride oxidation chemistry: An x-ray photoelectron spectroscopy study

Saha, Naresh C., Tompkins, Harland G.
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Volume:
72
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.351465
File:
PDF, 1.19 MB
english, 1992
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