The calculation, fabrication and verification of...

Optics and Lasers in Engineering 2013 / 10 Vol. 51; Iss. 10

The calculation, fabrication and verification of diffraction grating based on laser beam splitters employing a white light scatterometry technique

Tamulevičius, Tomas, Gražulevičiūtė, Ieva, Jurkevičiūtė, Aušrinė, Tamulevičius, Sigitas
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Volume:
51
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2013.04.001
Date:
October, 2013
File:
PDF, 1.57 MB
english, 2013
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