Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches
Zhenyin Yang,, Lichtenwalner, D.J., Morris, A.S., Krim, J., Kingon, A.I.Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2008.2010850
Date:
April, 2009
File:
PDF, 1.06 MB
english, 2009