Properties of [Mg 2 (thd) 4 ] as a Precursor for Atomic Layer Deposition of MgO Thin Films and Crystal Structures of [Mg 2 (thd) 4 ] and [Mg(thd) 2 (EtOH) 2 ]
Hatanpää, Timo, Ihanus, Jarkko, Kansikas, Jarno, Mutikainen, Ilpo, Ritala, Mikko, Leskelä, MarkkuVolume:
11
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm991008e
Date:
July, 1999
File:
PDF, 161 KB
english, 1999