Low-stress indium–tin–oxide thin films rf magnetron...

Applied Physics Letters 2002 Vol. 81; Iss. 10

Low-stress indium–tin–oxide thin films rf magnetron sputtered on polyester substrates

Carcia, P. F., McLean, R. S., Reilly, M. H., Li, Z. G., Pillione, L. J., Messier, R. F.
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Volume:
81
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1504874
File:
PDF, 374 KB
english, 2002
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