Analysis and wafer-level design of a high-order silicon...

Journal of Micromechanics and Microengineering 2011 / 01 Vol. 21; Iss. 1

Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices

Yoon, Sang Won, Lee, Sangwoo, Perkins, Noel C, Najafi, Khalil
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/1/015017
Date:
January, 2011
File:
PDF, 1.14 MB
english, 2011
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