Analysis and characterization of triangular electrode structures for electrostatic energy harvesting
Hoffmann, Daniel, Folkmer, Bernd, Manoli, YiannosVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/104002
Date:
October, 2011
File:
PDF, 1.69 MB
english, 2011