Analysis and characterization of triangular electrode...

Analysis and characterization of triangular electrode structures for electrostatic energy harvesting

Hoffmann, Daniel, Folkmer, Bernd, Manoli, Yiannos
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/104002
Date:
October, 2011
File:
PDF, 1.69 MB
english, 2011
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