Nitrogen modification of hydrogenated amorphous carbon...

Nitrogen modification of hydrogenated amorphous carbon films

Silva, S. R. P., Robertson, J., Amaratunga, G. A. J., Rafferty, B., Brown, L. M., Schwan, J., Franceschini, D. F., Mariotto, G.
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Volume:
81
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363927
File:
PDF, 383 KB
english, 1997
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