Atomic layer-deposited platinum in high- k /metal gate stacks
Henkel, Christoph, Abermann, Stephan, Bethge, Ole, Bertagnolli, EmmerichVolume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/12/125013
Date:
December, 2009
File:
PDF, 736 KB
english, 2009