Multi-response optimization of ultrathin poly-SiGe films...

Microelectronic Engineering 2013 / 11 Vol. 111

Multi-response optimization of ultrathin poly-SiGe films characteristics for Nano-ElectroMechanical Systems (NEMS) using the grey-Taguchi technique

Asafa, T.B., Bryce, G., Severi, S., Said, S.A.M., Witvrouw, A.
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Volume:
111
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.171
Date:
November, 2013
File:
PDF, 943 KB
english, 2013
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