Raman and finite-element analysis of a mechanically...

Journal of Micromechanics and Microengineering 2001 / 01 Vol. 11; Iss. 1

Raman and finite-element analysis of a mechanically strained silicon microstructure

Bowden, Michael, Gardiner, Derek J, Wood, David, Burdess, James, Harris, Alun, Hedley, John
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Volume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/1/302
Date:
January, 2001
File:
PDF, 197 KB
english, 2001
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