SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - Comparison of refractive indices measured by m-lines and ellipsometry: application to polymer blend and ceramic thin films for gas sensors
Wood, Thomas, Le Rouzo, Judikaël, Flory, François, Coudray, Paul, Mastelaro, Valmor R., Pelissari, Pedro, Zilio, Sérgio, Postek, Michael T., Coleman, Victoria A., Orji, Ndubuisi G.Volume:
8466
Year:
2012
Language:
english
DOI:
10.1117/12.928693
File:
PDF, 1.51 MB
english, 2012