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Molecular Layer Deposition of Aluminum Alkoxide Polymer Films Using Trimethylaluminum and Glycidol
Lee, Younghee, Yoon, Byunghoon, Cavanagh, Andrew S., George, Steven M.Volume:
27
Language:
english
Journal:
Langmuir
DOI:
10.1021/la202391h
Date:
December, 2011
File:
PDF, 4.54 MB
english, 2011