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Time evolution of ion energies in HIPIMS of chromium plasma discharge
Hecimovic, A, Ehiasarian, A PVolume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/13/135209
Date:
July, 2009
File:
PDF, 999 KB
english, 2009