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Experimental study of a pre-ionized high power pulsed magnetron discharge
Vašina, P, Meško, M, Imbert, J C, Ganciu, M, Boisse-Laporte, C, Poucques, L de, Touzeau, M, Pagnon, D, Bretagne, JVolume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/3/009
Date:
August, 2007
File:
PDF, 316 KB
english, 2007