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Phototriggered Acid Proliferation to Enhance Photosensitivity of Chemically Amplified Photoresists
Koji Arimitsu, Kunihiro IchimuraVolume:
202
Year:
2001
Language:
english
Pages:
8
DOI:
10.1002/1521-3935(20010201)202:33.0.co;2-b
File:
PDF, 143 KB
english, 2001