Atomic Layer Deposition of SrTiO 3...

Chemistry of Materials 2011 / 04 Vol. 23; Iss. 8

Atomic Layer Deposition of SrTiO 3 Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors

Lee, Sang Woon, Han, Jeong Hwan, Han, Sora, Lee, Woongkyu, Jang, Jae Hyuck, Seo, Minha, Kim, Seong Keun, Dussarrat, C., Gatineau, J., Min, Yo-Sep, Hwang, Cheol Seong
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Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm2002572
Date:
April, 2011
File:
PDF, 3.96 MB
english, 2011
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