Densification of growing coatings by ion beams
Bakai, A S, Zhukov, A I, Sleptsov, S NVolume:
11
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/11/29/315
Date:
July, 1999
File:
PDF, 194 KB
english, 1999