Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
Voiculescu, I., Zaghloul, M.E., McGill, R.A., Houser, E.J., Fedder, G.K.Volume:
5
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2005.851016
Date:
August, 2005
File:
PDF, 1001 KB
english, 2005