![](/img/cover-not-exists.png)
Atomic force microscopy study of surface roughening of sputter-deposited TiN thin films
Liu, Z.-J., Jiang, N., Shen, Y. G., Mai, Y.-W.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1504497
File:
PDF, 455 KB
english, 2002